Annotation of the articleResonant properties of three-layer metallic cantilevers with 40 nm thickness are investigated. Two types of nanocantilevers were fabricated: Cr-Al-Cr and Ti-Al-Ti. Resonant frequencies of nanocantilevers were determined from experimentally obtained resonant curves. Cantilever oscillations were excited by electric force, registration of cantilever motion was performed by optical lever method. Dependencies of first and second resonant frequencies on cantilever length and width were experimentally obtained. Experimental data analysis and comparison with theoretical predictions were performed. Relations between cantilever resonant properties and its dimensions and material are discussed.
Keywords: nanoelectromechanical systems, nanocantilever, resonant frequency, bending mode, optical lever, surface roughness