Annotation of the articleThe resonance characteristics of the three-layer metallic micro-and nanobeams having thickness from 60 to 180 nm are studied.
Vibrations of beams excited electrostatically and registrated by an optical method. The dependences of the resonance frequencies of beams from the geometric parameters of the beams obtained. A comparison of experimental data with the results of analytical calculations and numerical simulations executed.
Keywords: metal micro- and nanobeams, multi-layer beams, electrostatic actuation, resonant frequency